Novel coplanar-strip slow-wave structure for ultrawide-bandwidth electro-optic modulators

✍ Scribed by H. R. Khazaei; R. James; E. Berolo; F. Rahmatian; N. A. F. Jaeger; F. Ghannouchi

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 92 KB
• Volume: 15
• Category: Article
• ISSN: 0895-2477
• DOI: 10.1002/(sici)1098-2760(19970805)15:5<303::aid-mop10>3.0.co;2-6

✦ Synopsis

A no¨el coplanar-strip CPS slow-wa¨e structure for use in compound semiconductor electro-optic modulators is presented. The de¨ice uses interdigitated fins and pads to reduce the microwa¨e phase ( ) and group ¨elocity to match the speed of light in the optical wa¨eguides, and thus to increase the bandwidth of such modulators well into the millimeter-wa¨e range. These structures were fabricated on semiinsu-( ) lating SI GaAs and show an electrical bandwidth in excess of 40 GHz. The effects on the microwa¨e performance of the CPS slow-wa¨e ( ) structures due to the presence of a thin layer of SiO 0.2 m between 2 the SI GaAs and the metal structures, as well as the presence of the ( ) optical ridge wa¨eguide 0.9 m deep were also in¨estigated. ᮊ 1997