Fully planar AlGaAs/GaAs heterojunction
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R. Driad; A.M. Duchenois; G. Le Roux; D. Zerguine; F. Alexandre; J.L. Benchimol;
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Article
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1994
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Elsevier Science
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English
⚖ 242 KB
Fully planar A1GaAs/GaAs heterojunction bipolar transitors (HBTs) were fabricated successfully using chemical beam epitaxy selective regrowth. The device performance and fabrication process are presented along with characterization of the electrical, structural and optical properties of GaAs : C lay