𝔖 Bobbio Scriptorium

✦ LIBER ✦

Normally closed microvalve and mircopump fabricated on a silicon wafer

✍ Scribed by Masayoshi Esashi; Shuichi Shoji; Akira Nakano

Book ID: 107927742
Publisher: Elsevier Science
Year: 1989
Weight: 520 KB
Volume: 20
Category: Article
ISSN: 0250-6874
DOI: 10.1016/0250-6874(89)87114-8

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Top-Down Fabricated Silicon-Nanowire-Bas

Top-Down Fabricated Silicon-Nanowire-Based Field-Effect Transistor Device on a (111) Silicon Wafer

✍ Yu, Xiao; Wang, Yuchen; Zhou, Hong; Liu, Yanxiang; Wang, Yi; Li, Tie; Wang, Yuel 📂 Article 📅 2012 🏛 John Wiley and Sons 🌐 English ⚖ 819 KB

Structural evaluation of silicon-on-insu

Structural evaluation of silicon-on-insulator fabricated by a direct wafer bonding and numerically controlled polishing technique: A. Yamada, B. Jiang, G. A. Rozgonyi, H. Shirotori, O. Okabayashi, M. Kawashima, Journal of the Electrochemical Society, 138(8), pp. 2468–2474. (Aug 1991)

📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 138 KB

[IEEE IEEE International Solid-State Sen

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - A simple, robust and controllable nano-structures fabrication technique using standard silicon wafers

✍ Tixier-Mita, A.; Mita, Y.; Fujita, H. 📂 Article 📅 2003 🏛 IEEE ⚖ 370 KB