𝔖 Bobbio Scriptorium
✦   LIBER   ✦

NOP: a new software tool for neutron optics

✍ Scribed by L Alianelli; M Sánchez del Rı́o; R Felici


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
345 KB
Volume
350
Category
Article
ISSN
0921-4526

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Marks for SCALPEL® tool optics optimizat
✍ R.C. Farrow; G.M. Gallatin; W.K. Waskiewicz; J.A. Liddle; I. Kizilyalli; A. Korn 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 289 KB

A method for optimizing the electron optics of the SCALPEL exposure tool is described. The method uses the SCALPEL mark detection method with a grating mark as an aerial image monitor. The root-mean-square deviation of the recorded backscattered electron signal from an ideal triangle waveform was us