Dose and pressure dependence of silicon
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H.R. Dehghanpour; P. Parvin; B. Sajad; S.S. Nour-Azar
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Article
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2009
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Elsevier Science
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English
โ 856 KB
ArF excimer laser radiation on Si surface at controlled SF 6 atmosphere creates a microstructure whose alteration at various UV doses and SF 6 pressures are investigated in this work. Moreover, a rigorous model has been presented here regarding the experiments based on the micro-fluid mechanical pro