Dose and pressure dependence of silicon microstructure in SF6 gas due to excimer laser irradiation
✍ Scribed by H.R. Dehghanpour; P. Parvin; B. Sajad; S.S. Nour-Azar
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 856 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0169-4332
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✦ Synopsis
ArF excimer laser radiation on Si surface at controlled SF 6 atmosphere creates a microstructure whose alteration at various UV doses and SF 6 pressures are investigated in this work. Moreover, a rigorous model has been presented here regarding the experiments based on the micro-fluid mechanical properties of molten silicon layer and the subsequent mechanical wave resonance due to the surface shallow fluid theory. The competitive thermal and non-thermal UV laser interaction with Si and the following heat transfer explains the creation of the self-assembled micro-pillars on Si surface.