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Nonlinear spatially resolved phase spectroscopy

✍ Scribed by Leute, St.; Lottermoser, Th.; Fröhlich, D.


Book ID
115423797
Publisher
Optical Society of America
Year
1999
Tongue
English
Weight
366 KB
Volume
24
Category
Article
ISSN
0146-9592

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Spatially resolved stress analysis using
✍ A. Atkinson; S. C. Jain 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 109 KB 👁 2 views

Raman spectroscopy using a laser microprobe (also called micro-Raman) is becoming more widely used to study stress distribution in solids, particularly in micro-electronic device structures, because of its potential for high spatial resolution. Typically the diameter of the focused laser beam is 1 µ