𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Nonlinear problems arising in electrostatic actuation in MEMS

✍ Scribed by Janpou Nee

Book ID
108178357
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
175 KB
Volume
352
Category
Article
ISSN
0022-247X

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Nonlinear actuation model for lateral el
Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches
✍ A. LΓ‘zaro; D. Girbau; L. Pradell; A. Nebot πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 344 KB

## Abstract In this work, a nonlinear model to predict actuation characteristics in lateral electrostatically‐actuated DC‐contact MEMS switches is proposed. In this case a parallel‐plate approximation cannot be applied. The model is based on the equilibrium equation for an elastic beam. It is demon