✦ LIBER ✦

Nonisothermal chemical model of reactive sputtering

✍ Scribed by Barybin, Anatoly A.; Shapovalov, Victor I.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Mechanisms of reactive sputtering of ind

✍ A.H. Eltoukhy; B.R. Natarajan; J.E. Greene; T.L. Barr 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 433 KB

A model for reactive magnetron sputterin

✍ C.D. Tsiogas; J.N. Avaritsiotis 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 969 KB

A model for reactive sputtering with mag

✍ T. Larsson 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 548 KB

Modelling of reactive sputtering of tita

✍ T. Larsson; S. Berg; H.-O. Blom 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 445 KB

Modeling the stability of reactive sputt

✍ H. Bartzsch; P. Frach 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 188 KB

A thermodynamic model of deposition by e

✍ V. A. Koss; J. L. Vossen 📂 Article 📅 1991 🏛 Springer 🌐 English ⚖ 539 KB