Nondestructive thickness measurement of thin films on microstructures : I. Franz and W. Langheinrich, Solid-St. Electron.11 (1968), p. 987

• Publisher: Elsevier Science
• Year: 1969
• Tongue: English
• Weight: 95 KB
• Volume: 8
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(69)90248-0