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Nondestructive method for the characterization of ion-implanted waveguides

✍ Scribed by Guarino, Andrea; Günter, Peter


Book ID
115427795
Publisher
Optical Society of America
Year
2005
Tongue
English
Weight
157 KB
Volume
30
Category
Article
ISSN
0146-9592

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## Characterization of the Microhardness of Ion-implanted GaP Dedicated to Professor E. BUTTER in honour of his 60th birthday Implantation induced changes of the microhardness are studied in GaP single crystals which were bombarded with ions in the range of mass numbers M = 1-40. It IS observed th