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Non-resonant electromagnetic wideband energy harvesting mechanism for low frequency vibrations

โœ Scribed by Bin Yang; Chengkuo Lee

Book ID
106185923
Publisher
Springer-Verlag
Year
2010
Tongue
English
Weight
458 KB
Volume
16
Category
Article
ISSN
0946-7076

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A PZT piezoelectric cantilever with a micromachined Si proof mass is designed and fabricated for a low frequency vibration energy harvesting application. The SiO 2 layer in the SOI wafer promotes accurate control of the silicon thickness that is used as a supporting layer in the cantilever beam stru