Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting
✍ Scribed by Dongna Shen; Jung-Hyun Park; Joo Hyon Noh; Song-Yul Choe; Seung-Hyun Kim; Howard C. Wikle III; Dong-Joo Kim
- Book ID
- 104092645
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 600 KB
- Volume
- 154
- Category
- Article
- ISSN
- 0924-4247
No coin nor oath required. For personal study only.
✦ Synopsis
A PZT piezoelectric cantilever with a micromachined Si proof mass is designed and fabricated for a low frequency vibration energy harvesting application. The SiO 2 layer in the SOI wafer promotes accurate control of the silicon thickness that is used as a supporting layer in the cantilever beam structure. The entire effective volume of the fabricated device is about 0.7690 mm 3 . When excited at 0.75g (g = 9.81 m/s 2 ) acceleration amplitude at its resonant frequency of 183.8 Hz, the AC output measured across a resistive load of 16 k connecting to the device in parallel has an amplitude of 101 mV. The average power and power density determined by the same measurement conditions are, respectively, 0.32 W and 416 W/cm 3 .