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Non-destructive evaluation of TiN films with interface defects by surface acoustic waves

✍ Scribed by H. Ollendorf; D. Schneider; Th. Schwarz; A. Mucha

Book ID: 107930513
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 589 KB
Volume: 74-75
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(95)08233-6

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