Non-destructive diagnostic techniques for oxygen precipitates in Czochralski silicon

✍ Scribed by A. Bazzali; G. Borionetti; R. Falster; D. Gambaro; L. Mule’Stagno; M. Olmo; R. Orizio; M. Porrini

• Book ID: 104420519
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 187 KB
• Volume: 4
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/s1369-8001(00)00163-3