Investigations for the improvement of th
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Dr. Ing. W. SchrΓΆder; Dr. rer. nat. H.-J. Rost; Dr. rer. nat. E. Wolf
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Article
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1989
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John Wiley and Sons
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English
β 606 KB
## Investigations for the Improvement of the Radial Doping Homogeneity of Dislocation-free Floating Zone Silicon Crystals I n order t o improve the doping inhomogeneities of dislocation free F Z Silicon crystals with diameters 2 75 mm investigations were carried out t o influence the shape and cur