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Non-contact optical profilometer with linearized response and high sensitivity

✍ Scribed by J. Shamir; A. Brunfeld; G. Toker

Publisher: Elsevier Science
Year: 1988
Weight: 452 KB
Volume: 21
Category: Article
ISSN: 0308-9126
DOI: 10.1016/0308-9126(88)90288-x

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