Atomic layer deposition for the fabricat
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I.M. Povey; M. Bardosova; F. Chalvet; M.E. Pemble; H.M. Yates
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Article
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2007
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Elsevier Science
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English
โ 349 KB
In order to highlight the way in which atomic layer deposition (ALD) methods may be used to prepare complex 3D structures, we consider the modification of photonic crystals such as synthetic opals that may be readily prepared from monodispersed assemblies of colloidal particles. In such materials it