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Non-aqueous sol–gel routes applied to atomic layer deposition of oxides

✍ Scribed by Clavel, Guylhaine; Rauwel, Erwan; Willinger, Marc-Georg; Pinna, Nicola

Book ID: 115440679
Publisher: Royal Society of Chemistry
Year: 2009
Tongue: English
Weight: 218 KB
Volume: 19
Category: Article
ISSN: 0959-9428
DOI: 10.1039/b806215c

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