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Nitrogen–Hydrogen Plasma Processing of Thin Vanadium Films

✍ Scribed by A. M. Chaplanov; E. N. Shcherbakova

Book ID: 111532434
Publisher: SP MAIK Nauka/Interperiodica
Year: 2001
Tongue: English
Weight: 258 KB
Volume: 37
Category: Article
ISSN: 0020-1685
DOI: 10.1023/a:1004157128875

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