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Nitrogen plasma cleaning of Ge(1 0 0) surfaces

✍ Scribed by Katsuhiro Kutsuki; Gaku Okamoto; Takuji Hosoi; Takayoshi Shimura; Heiji Watanabe

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 534 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.02.011

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