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Nitrogen doping during growth of dislocation-free FZ silicon crystals

✍ Scribed by Dr. E. Wolf; Dr. W. Schröder

Publisher: John Wiley and Sons
Year: 1987
Tongue: English
Weight: 119 KB
Volume: 22
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.2170220226

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