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Nitrogen-doped plasma enhanced chemical vapor deposited (PECVD) amorphous carbon: processes and properties

โœ Scribed by Steven M Smith; Steven A Voight; Harland Tompkins; Andy Hooper; A.Alec Talin; Joseph Vella


Book ID
117226640
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
281 KB
Volume
398-399
Category
Article
ISSN
0040-6090

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