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Nitriding of bulk titanium and thin titanium films in a NH3 low pressure plasma

✍ Scribed by N. Laidani; J. Perriere; D. Lincot; A. Gicquel; J. Amouroux

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 376 KB
Volume: 36
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90946-x

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