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Nitric acid method for fabrication of gate oxides in TFT

✍ Scribed by Shigeaki Mizushima; Shigeki Imai; Asuha; Masato Tanaka; Hikaru Kobayashi


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
521 KB
Volume
254
Category
Article
ISSN
0169-4332

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