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Niobium trilayer process for superconducting circuits

โœ Scribed by Murduck, J.M.; Porter, J.; Dozier, W.; Sandell, R.; Burch, J.; Bulman, J.; Dang, C.; Lee, L.; Chan, H.; Simon, R.W.; Silver, A.H.

Book ID
114549867
Publisher
IEEE
Year
1989
Tongue
English
Weight
326 KB
Volume
25
Category
Article
ISSN
0018-9464

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Superconducting niobium and niobium nitr
Superconducting niobium and niobium nitride processes for medium-scale integration applications
โœ M. Radparvar ๐Ÿ“‚ Article ๐Ÿ“… 1995 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 691 KB

A 10 layer circuit process is described that is based on relatively reproducible, high quality, all-niobium (Nb) and niobium nitride (NbN) Josephson junctions. The junctions are fabricated from in-situ trilayer films of S/M-MOx/S using a selective niobium etching process (SNEP), where S is supercond