Superconducting niobium and niobium nitride processes for medium-scale integration applications

✍ Scribed by M. Radparvar

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 691 KB
• Volume: 35
• Category: Article
• ISSN: 0011-2275
• DOI: 10.1016/0011-2275(95)98222-m

✦ Synopsis

A 10 layer circuit process is described that is based on relatively reproducible, high quality, all-niobium (Nb) and niobium nitride (NbN) Josephson junctions. The junctions are fabricated from in-situ trilayer films of S/M-MOx/S using a selective niobium etching process (SNEP), where S is superconducting Nb or NbN and M is aluminium (Al) to form the barrier for Nb junctions, or magnesium (Mg) to form the barrier for NbN junctions. These junctions have been incorporated into a 10 level process that has been used to fabricate numerous analogue and digital circuits. This paper describes this superconducting process and its application to circuit fabrication for demonstrating superconducting circuits of medium-scale complexity.