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Nickel stamp fabrication using step & stamp imprint lithography

✍ Scribed by Tomi Haatainen; Päivi Majander; Tommi Riekkinen; Jouni Ahopelto

Book ID
108207569
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
620 KB
Volume
83
Category
Article
ISSN
0167-9317

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Proton beam fabrication of nickel stamps
Proton beam fabrication of nickel stamps for nanoimprint lithography
✍ K. Ansari; P.G. Shao; J.A. van Kan; A.A. Bettiol; F. Watt 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 339 KB

Nickel stamps with micro and nano-scale relief features on their surfaces have been fabricated using proton beam writing coupled with nickel sulfamate electroplating. A focused beam of sub-micron 2.0 MeV protons was used to direct-write 3D patterns into spin coated PMMA resist, and a single step nic