✦ LIBER ✦
Eliminating the undercut phenomenon in interference lithography for the fabrication of nano-imprint lithography stamp
✍ Scribed by Hwan Soo Jang; Gee Hong Kim; Jaejong Lee; Kee Bong Choi
- Book ID
- 108079361
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 905 KB
- Volume
- 10
- Category
- Article
- ISSN
- 1567-1739
No coin nor oath required. For personal study only.