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Nickel-chromium interface resolution in Auger depth profiles

✍ Scribed by D.F Mitchell; G.I Sproule


Book ID
118986922
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
749 KB
Volume
177
Category
Article
ISSN
0039-6028

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The ion-bombardment-induced defects and their effect on the capability of Auger depth profiling is reviewed and discussed. It is shown that by using low ion energy ( Ͻ 1 keV) and grazing angle of incidence ( Ͼ 80Њ), the quasi-quantitative detection of layers with thickness of 1 nm can be acheived. W