High-depth-resolution Auger depth profil
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M Menyhard
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Article
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1999
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Elsevier Science
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English
β 254 KB
The ion-bombardment-induced defects and their effect on the capability of Auger depth profiling is reviewed and discussed. It is shown that by using low ion energy ( Ο½ 1 keV) and grazing angle of incidence ( ΟΎ 80Π), the quasi-quantitative detection of layers with thickness of 1 nm can be acheived. W