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Ni silicide layer formation using low-energy ion beams

✍ Scribed by Nobuteru Tsubouchi; Yuji Horino

Book ID: 103859137
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 195 KB
Volume: 232
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.03.069

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