New suspended gate FET technology for physical deposition of chemically sensitive layers

✍ Scribed by H. Lorenz; M. Peschke; H. Riess; J. Janata; I. Eisele

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 351 KB
• Volume: 23
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(90)87082-t