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Optimization of sputtered SnO2 films as gas-sensitive layers for suspended-gate FETs

✍ Scribed by M. Peschke; W. Hansch; J. Lechner; H. Lorenz; H. Riess; I. Eisele


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
275 KB
Volume
4
Category
Article
ISSN
0925-4005

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