New Single-Source Precursors for the MOCVD of High-ϰ Dielectric Zirconium Silicates to Replace SiO2 in Semiconducting Devices.

✍ Scribed by Stefan Zuercher; Marcus Morstein; Nicholas D. Spencer; Martin Lemberger; Anton Bauer

• Publisher: John Wiley and Sons
• Year: 2010
• Weight: 39 KB
• Volume: 33
• Category: Article
• ISSN: 0931-7597
• DOI: 10.1002/chin.200243013