New Single-Source Precursors for the MOCVD of High-κ Dielectric Zirconium Silicates to Replace SiO2 in Semiconducting Devices

✍ Scribed by S. Zürcher; M. Morstein; N. D. Spencer; M. Lemberger; A. Bauer

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 592 KB
• Volume: 8
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/1521-3862(20020704)8:4<171::aid-cvde171>3.0.co;2-z