New possibilities for determination of solids surface parameters by X-ray reflectivity

✍ Scribed by Fodchuk, I. ;Balovsyak, S.

• Publisher: John Wiley and Sons
• Year: 2007
• Tongue: English
• Weight: 709 KB
• Volume: 204
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200622171

✦ Synopsis

Abstract

New possibilities for research on solids surface morphology by X‐ray reflectivity (XRR) methods are presented. The method for reconstruction of surface geometry fragments is suggested. A series of GaAs crystals with a periodic surface relief and SiO~2~ plates with a random surface relief are investigated as test samples. Correlation of parameters of the XRR curves and surface relief with the results of atomic‐force microscopy is refined. The algorithms of the XRR curves calculation and surface‐profile reconstruction are complemented. The fractal approach to describing the shape of the XRR curves and surface profiles is used. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)