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New method of Plasma doping with in-situ Helium pre-amorphization

✍ Scribed by Y. Sasaki; C.G. Jin; K. Okashita; H. Tamura; H. Ito; B. Mizuno; H. Sauddin; R. Higaki; T. Satoh; K. Majima; Y. Fukagawa; K. Takagi; I. Aiba; S. Ohmi; K. Tsutsui; H. Iwai

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 164 KB
Volume: 237
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.04.109

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