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New industrial training facilities at SIRA


Publisher
Elsevier Science
Year
1967
Tongue
English
Weight
209 KB
Volume
17
Category
Article
ISSN
0042-207X

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An industrial SR-TXRF facility at ESRF
โœ F Comin; P Mangiagalli; M Navizet; G Apostolo ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 35 KB

A TXRF industrial facility for the mapping of trace impurities on the surface of 300-mm Silicon wafers is presently in the construction phase and will start the commissioning phase at the end of 1998. The elements to be detected range from Na to 8 2 Hg with a target routine detection limit of 10 at