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New diagnostic aspects of high rate a-Si:H deposition in a VHF plasma

✍ Scribed by M. Heintze; R. Zedlitz

Book ID: 115991064
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 271 KB
Volume: 198-200
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(96)00035-x

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