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New approaches for reactive sputtering of dielectric materials on large scale substrates

✍ Scribed by G. Bräuer; J. Szczyrbowski; G. Teschner

Book ID: 117148361
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 340 KB
Volume: 218
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(97)00159-2

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