New alternative arsenic precursors for the metal-organic vapour-phase epitaxy of III–V semiconductors: in-situ formation of AsH functionality by β elimination of specific metal-organic arsenic compounds

✍ Scribed by P. Gimmnich; A. Greiling; J. Lorberth; C. Thalmann; K. Rademann; G. Zimmermann; H. Protzmann; W. Stolz; E.O. Göbel

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 411 KB
• Volume: 17
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(93)90075-x