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New actuation method for push-pull electrostatic MEMS comb drive

✍ Scribed by Tao Zhao; Yung C Liang

Book ID: 119816943
Publisher: IEEE
Year: 2003
Tongue: English
Weight: 353 KB
Volume: 50
Category: Article
ISSN: 1932-4529
DOI: 10.1109/tie.2003.819567

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