Neural networks application for OPC (optical proximity correction) in mask making

✍ Scribed by P. Jedrasik

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 285 KB
• Volume: 30
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(95)00218-9