𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Neural network modelling and control strategies for a pH process

✍ Scribed by A.P. Loh; K.O. Looi; K.F. Fong


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
603 KB
Volume
5
Category
Article
ISSN
0959-1524

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Run-to-run process control of a plasma e
✍ Jill P. Card; Mark Naimo; William Ziminsky πŸ“‚ Article πŸ“… 1998 πŸ› John Wiley and Sons 🌐 English βš– 250 KB πŸ‘ 2 views

Run-to-run control of a plasma etch process for 8 inch diameter silicon wafers at Digital Semiconductor is determined by maintenance of targeted values of post-etch metrology variables. The post-etch quality variables are extremely sensitive to variation in the etch chamber conditions due to fluctua

A neural network model for the wire bond
✍ Qiwen Wang; Xiaoyun Sun; Bruce L. Golden; Lenore Desilets; Edward A. wasil; Scot πŸ“‚ Article πŸ“… 1993 πŸ› Elsevier Science 🌐 English βš– 899 KB