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Negative Ions, Ozone, and Metastable Components in dc Oxygen Glow Discharge

โœ Scribed by L. E. Khvorostovskaya; V. A. Yankovsky


Publisher
John Wiley and Sons
Year
1991
Tongue
English
Weight
972 KB
Volume
31
Category
Article
ISSN
0005-8025

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The spatial distribution of ozone and of oxygen atoms was studied along the active and the passive zone of a dc discharge (positive column, pressure: p = ( 4 . . .lo) . 10' Pa, current: I = 2 . . .50 mA, flow rate: F = 5 . . .lo0 sccm) in flowing oxygen. The composition of the final output 02/03-mix