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Negative ion formation during deposition of composite plasma polymer-metal films

✍ Scribed by L. Martinů; P. Špatenka; H. Biederman; M. Šícha

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 169 KB
Volume: 141
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(86)90360-3

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