Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating

✍ Scribed by Kowalski, Michael P. ;Heilmann, Ralf K. ;Schattenburg, Mark L. ;Chang, Chih-Hao ;Berendse, Frederick B. ;Hunter, William R.

• Book ID: 115352671
• Publisher: The Optical Society
• Year: 2006
• Tongue: English
• Weight: 449 KB
• Volume: 45
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.45.001676