✦ LIBER ✦
Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating
✍ Scribed by Kowalski, M. P.; Cruddace, R. G.; Heidemann, K. F.; Lenke, R.; Kierey, H.; Barbee, Jr., T. W.; Hunter, W. R.
- Book ID
- 115427096
- Publisher
- Optical Society of America
- Year
- 2004
- Tongue
- English
- Weight
- 624 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0146-9592
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