✦ LIBER ✦

NCKU and Aixtron co-operate on dilute nitride materials

Book ID: 104366289
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 325 KB
Volume: 16
Category: Article
ISSN: 0961-1290
DOI: 10.1016/s0961-1290(03)00982-7

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✦ Synopsis

Matheson Tri-Gas Inc's Electronics Group (MTEG) has launched ULTIMA-Sorb, a new and improved solution for hydride abatement.

Developed in alliance with ATMI Inc, the ULTIMA-Sorb employs the newest dry abatement technology to abate MOCVD process gases, especially arsine and phosphine.

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