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NbN edge junction fabrication: edge profile control by reactive ion etching

✍ Scribed by Meng, X.F.; Amos, R.S.; Lichtenberger, A.W.; Mattauch, R.J.; Feldman, M.J.

Book ID: 114549889
Publisher: IEEE
Year: 1989
Tongue: English
Weight: 349 KB
Volume: 25
Category: Article
ISSN: 0018-9464
DOI: 10.1109/20.92520

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